Resonant magnetic sensor using magnetic gradient field formed by permalloy concentrator

研究成果: Conference contribution

1 被引用数 (Scopus)

抄録

This paper reports a novel resonant magnetic sensor using a magnetic gradient field formed by a magnetic concentrator consisted of asymmetric and facing two permalloy plates. A Si cantilever with a size of 5×15×200 μm3 is placed between the gap of the magnetic concentrator, and a 10μm-diameter magnetic particle is placed on the tip of the cantilever. The resonant frequency changes as the magnetic force is impinged on the magnetic particle by the magnetic field gradient formed by the magnetic concentrator. The extremal magnetic field can be measured from the resonant frequency change. The resonant magnetic sensor is fabricated by conventional microfabrication techniques, and the magnetic force-depended resonant frequency change is evaluated under the self-oscillation condition. The experimental magnetic resolution was estimated to be 5.1×10-7 T considering the experimental noise level (3.29 ppm). By downsizing the cantilever and optimizing the permalloy concentrator, this resonant magnetic sensor has a feasibility to achieve a magnetic field resolution of 1.7 ×10-14 T.

本文言語English
ホスト出版物のタイトルTRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems
出版社Institute of Electrical and Electronics Engineers Inc.
ページ822-825
ページ数4
ISBN(電子版)9781538627310
DOI
出版ステータスPublished - 2017 7 26
イベント19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017 - Kaohsiung, Taiwan, Province of China
継続期間: 2017 6 182017 6 22

出版物シリーズ

名前TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems

Other

Other19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017
CountryTaiwan, Province of China
CityKaohsiung
Period17/6/1817/6/22

ASJC Scopus subject areas

  • Chemical Health and Safety
  • Instrumentation
  • Electrical and Electronic Engineering

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