Resolution enhancement in contact-type scanning nonlinear dielectric microscopy using a conductive carbon nanotube probe tip

Kenya Ishikawa, Koichiro Honda, Yasuo Cho

研究成果: Article査読

15 被引用数 (Scopus)

抄録

The lateral resolution of a scanning nonlinear dielectric microscope (SNDM) depends on the tip radius. The contact-type SNDM has problems associated with tip abrasion and tip deformation. Thus, the use of an electro-conductive carbon nanotube (CNT) probe tip is expected to lead to improvements in resolution and durability. In the present paper, we employ a contact-type SNDM with a CNT probe to measure the ferroelectric domain wall of stoichiometric lithium tantalate (LiTaO3), and similar SNDM measurements are performed with a platinum-coated probe for comparison. In addition, we observe the charge distribution accumulated in a floating gate (FG) type flash memory and the dopant profile of an n-channel metal-oxide-semiconductor field-effect transistor (MOSFET), respectively. By comparing the SNDM images obtained with the two probes, we demonstrate that the lateral resolution of the CNT probe is better than that of the conventional metal-coated probe.

本文言語English
論文番号084015
ジャーナルNanotechnology
18
8
DOI
出版ステータスPublished - 2007 2月 28

ASJC Scopus subject areas

  • バイオエンジニアリング
  • 化学 (全般)
  • 材料科学(全般)
  • 材料力学
  • 機械工学
  • 電子工学および電気工学

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