Repairing damage on ground fused silica by CO2 laser irradiation

Peng Yao, Takuro Abe, Nobuhito Yoshihara, Tianfeng Zhou, Jiwang Yan, Tsunemoto Kuriyagawa

研究成果: Conference contribution

5 被引用数 (Scopus)

抄録

Fused silica is an important material for optics of ultraviolet laser transmission. It is difficult to be ground in ductile mode because of a high brittleness. In this paper, ductile mode grinding was achieved by a taper grinding method when the initial surface was a polished surface. However, when the initial surface was an unpolished surface, ductile mode grinding could not be realized because of the existence of surface and subsurface damages. The damages on the ground fused silica surface were repaired by CO2 laser irradiation with optimal laser power and scanning velocity. The optimal parameters were determined by studying the viscosity of fused silica and etching depth of laser irradiated groove. Besides laser processing parameters, surface roughness of laser irradiated surface is also greatly influenced by the initial surface roughness

本文言語English
ホスト出版物のタイトルAdvances in Abrasive Technology XIII
ページ401-406
ページ数6
DOI
出版ステータスPublished - 2010
イベント13th International Symposium on Advances in Abrasive Technology, ISAAT2010 - Taipei, Taiwan, Province of China
継続期間: 2010 9月 192010 9月 22

出版物シリーズ

名前Advanced Materials Research
126-128
ISSN(印刷版)1022-6680

Other

Other13th International Symposium on Advances in Abrasive Technology, ISAAT2010
国/地域Taiwan, Province of China
CityTaipei
Period10/9/1910/9/22

ASJC Scopus subject areas

  • 工学(全般)

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