Reliability characteristics of W-La2O3 structures compared with those of HfO2-based gate oxides
J. Molina, F. J. De La Hidalga, P. Rosales, K. Kakushima, P. Ahmet, K. Tsutsui, N. Sugii, T. Hattori, H. Iwai
研究成果: Conference contribution
1
被引用数
(Scopus)