Reflection Lau imaging and its application to displacement sensing

K. Hane, S. Hattori, C. P. Grover

研究成果: Article査読

抄録

The interference fringe known as the Lau image is produced at the infinite image plane when two transmission gratings are located in tandem and are illuminated incoherently. We have studied this imaging by analyzing the optical arrangement in which the second transmission grating is replaced by a reflection grating. Unlike the transmission Lau imaging, the new set of fringes become changeable in their profile when one of the gratings is subjected to an inplane translatory motion in the direction perpendicular to the grating lines. The phenomenon is investigated theoretically and experimentally from the viewpoint of displacement sensing. Using the combination of the binary gratings having duty cycle of 1/2, two fringe maxima with different intensities are obtained in a single period of the fringe pattern. Introducing the lateral displacement of the grating, one of the maxima decreases in its intensity while the other increases. The change of the fringe profile has been used for an alignment method. Using 25μm gratings and an automatic alignment system with piezo-electric actuators, alignment precision of about ±50nm has been obtained.

本文言語English
ページ(範囲)160-165
ページ数6
ジャーナルProceedings of SPIE - The International Society for Optical Engineering
954
DOI
出版ステータスPublished - 1989 1 16
外部発表はい

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 凝縮系物理学
  • コンピュータ サイエンスの応用
  • 応用数学
  • 電子工学および電気工学

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