Recent nano-precision ductile machining technology for advanced optical applications

研究成果: Conference contribution

抄録

Recent research and development work in the ductile machining technology for semiconductors and crystalline materials is reviewed. The latest applications of ductile machining to the fabrication of infrared optical elements and semiconductor substrates are introduced.

本文言語English
ホスト出版物のタイトルOptical Fabrication and Testing, OFT 2006
出版社Optical Society of America (OSA)
ISBN(印刷版)1557528187, 9781557528186
DOI
出版ステータスPublished - 2006
イベントOptical Fabrication and Testing, OFT 2006 - Rochester, NY, United States
継続期間: 2006 10 102006 10 10

出版物シリーズ

名前Optics InfoBase Conference Papers
ISSN(電子版)2162-2701

Conference

ConferenceOptical Fabrication and Testing, OFT 2006
CountryUnited States
CityRochester, NY
Period06/10/1006/10/10

ASJC Scopus subject areas

  • Instrumentation
  • Atomic and Molecular Physics, and Optics

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