Recent developments in soft X-ray emission spectroscopy microscopy

M. Terauchi, T. Hatano, M. Koike, A. S. Pirozhkov, H. Sasai, T. Nagano, M. Takakura, T. Murano

    研究成果: Conference article査読

    2 被引用数 (Scopus)


    This paper discusses the path to the commercialization of a soft-X-ray emission spectrometer system for EPMA/SEM, its application, how it can be used to investigate new materials, and offers an update on improvements being investigated to further optimise the performance. The ultimate energy resolution of 0.08 eV at Al L- Fermi edge is shown with current optics using a fine pixel detector. The spectral mapping technique can show chemical shift images by using an appropriate region-of-interest energy window. L-emissions of 3d transition metal elements inform one not only of the density of states of bonding but also the number of outer shell or 3d electrons. Furthermore, progress leading to improvements in the detection efficiency has resulted in more than three times increase in the B K-emission peak. Testing and evaluation of new high energy-resolution spectrometer for EPMA, and a new calibration procedure for C K-peak on graphite has resulted in improved energy calibration procedure is presented.

    ジャーナルIOP Conference Series: Materials Science and Engineering
    出版ステータスPublished - 2020 8月 5
    イベント16th European Workshop on Modern Developments and Applications in Microbeam Analysis, EMAS 2019 - Trondheim, Norway
    継続期間: 2019 5月 192019 5月 23

    ASJC Scopus subject areas

    • 材料科学(全般)
    • 工学(全般)


    「Recent developments in soft X-ray emission spectroscopy microscopy」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。