TY - JOUR
T1 - Recent developments in soft X-ray emission spectroscopy microscopy
AU - Terauchi, M.
AU - Hatano, T.
AU - Koike, M.
AU - Pirozhkov, A. S.
AU - Sasai, H.
AU - Nagano, T.
AU - Takakura, M.
AU - Murano, T.
N1 - Funding Information:
The metal-B6 materials are part of a collaboration with Prof M. Takeda of Nagaoka University of Technology, Nagaoka, Japan. This work was partly supported by the Research Program of "Dynamic Alliance for Open Innovation Bridging Human, Environment and Materials" in "Network Joint Research Centre for Materials and Devices", and JSPS KAKENHI Grant Number 19K21838.
Funding Information:
The metal-B6 materials are part of a collaboration with Prof M. Takeda of Nagaoka University of Technology, Nagaoka, Japan. This work was partly supported by the Research Program of "Dynamic Alliance for Open Innovation Bridging Human, Environment and Materials"in "Network Joint Research Centre for Materials and Devices", and JSPS KAKENHI Grant Number 19K21838.
Publisher Copyright:
© Published under licence by IOP Publishing Ltd.
PY - 2020/8/5
Y1 - 2020/8/5
N2 - This paper discusses the path to the commercialization of a soft-X-ray emission spectrometer system for EPMA/SEM, its application, how it can be used to investigate new materials, and offers an update on improvements being investigated to further optimise the performance. The ultimate energy resolution of 0.08 eV at Al L- Fermi edge is shown with current optics using a fine pixel detector. The spectral mapping technique can show chemical shift images by using an appropriate region-of-interest energy window. L-emissions of 3d transition metal elements inform one not only of the density of states of bonding but also the number of outer shell or 3d electrons. Furthermore, progress leading to improvements in the detection efficiency has resulted in more than three times increase in the B K-emission peak. Testing and evaluation of new high energy-resolution spectrometer for EPMA, and a new calibration procedure for C K-peak on graphite has resulted in improved energy calibration procedure is presented.
AB - This paper discusses the path to the commercialization of a soft-X-ray emission spectrometer system for EPMA/SEM, its application, how it can be used to investigate new materials, and offers an update on improvements being investigated to further optimise the performance. The ultimate energy resolution of 0.08 eV at Al L- Fermi edge is shown with current optics using a fine pixel detector. The spectral mapping technique can show chemical shift images by using an appropriate region-of-interest energy window. L-emissions of 3d transition metal elements inform one not only of the density of states of bonding but also the number of outer shell or 3d electrons. Furthermore, progress leading to improvements in the detection efficiency has resulted in more than three times increase in the B K-emission peak. Testing and evaluation of new high energy-resolution spectrometer for EPMA, and a new calibration procedure for C K-peak on graphite has resulted in improved energy calibration procedure is presented.
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U2 - 10.1088/1757-899X/891/1/012022
DO - 10.1088/1757-899X/891/1/012022
M3 - Conference article
AN - SCOPUS:85093864036
SN - 1757-8981
VL - 891
JO - IOP Conference Series: Materials Science and Engineering
JF - IOP Conference Series: Materials Science and Engineering
IS - 1
M1 - 012022
T2 - 16th European Workshop on Modern Developments and Applications in Microbeam Analysis, EMAS 2019
Y2 - 19 May 2019 through 23 May 2019
ER -