Real-time monitoring of the Si carbonization process by a combined method of reflection high-energy electron diffraction and Auger electron spectroscopy

Ryoji Kosugi, Yuji Takakuwa, Ki Seon Kim, Tadashi Abukawa, Shozo Kono

研究成果: Article査読

16 被引用数 (Scopus)

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「Real-time monitoring of the Si carbonization process by a combined method of reflection high-energy electron diffraction and Auger electron spectroscopy」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

Chemistry

Biochemistry, Genetics and Molecular Biology

Earth and Planetary Sciences

Physics

Material Science