RAPID MASKLESS CORRECTION OF AN LSI INTERCONNECTION UTILIZING NEWLY DEVELOPED LASER PROCESSING.

Shunji Kishida, Yukio Morishige, Fumihiko Uesugi, Hiroyuki Yokoyama, Takayuki Mizuta, Shinji Masuda, Kazunari Matsumoto

研究成果: Conference contribution

1 被引用数 (Scopus)

抄録

The authors discuss what they believe is the first demonstration of the interconnection correction of common structure LSIs. In particular, the feasibility of rapid maskless LSI circuit interconnection with laser processing has been demonstrated and verified on LSI chips with a widely adopted multilayered interconnection structure. This laser processing circuit correction scheme is expected to facilitate LSI circuit development.

本文言語English
ホスト出版物のタイトルUnknown Host Publication Title
出版社Optical Soc of America
ページ282-284
ページ数3
ISBN(印刷版)0936659491
出版ステータスPublished - 1987
外部発表はい

ASJC Scopus subject areas

  • 工学(全般)

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