Random telegraph signal statistical analysis using a very large-scale array TEG with 1M MOSFETs

K. Abe, S. Sugawa, S. Watabe, N. Miyamoto, A. Teramoto, Y. Kamata, K. Shibusawa, M. Toita, T. Ohmi

研究成果: Conference article査読

42 被引用数 (Scopus)

抄録

In this paper, we propose an advanced Test Element Group (TEG) which can measure a large number (106 MOSFETs) of electrical characteristics or noise characteristics with high accuracy in a very short time (0.2 sec/frame). We analyzed fluctuations of these characteristics statistically using this TEG, as the result, we confirmed that frequencies of the Random Telegraph Signal (RTS) appearance and amplitudes of the RTS become larger with the scaling-down from statistical analysis. We did not find a correlation between DC characteristic fluctuations and random noise which is caused by RTS. (.

本文言語English
論文番号4339696
ページ(範囲)210-211
ページ数2
ジャーナルDigest of Technical Papers - Symposium on VLSI Technology
DOI
出版ステータスPublished - 2007
イベント2007 Symposium on VLSI Technology, VLSIT 2007 - Kyoto, Japan
継続期間: 2007 6 122007 6 14

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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