Questionnaire survey on ultra-precision positioning

T. Oiwa, M. Katsuki, M. Karita, W. Gao, S. Makinouchi, K. Sato, Y. Oohashi

研究成果: Conference contribution

4 被引用数 (Scopus)

抄録

Questionnaire surveys on the ultra-precision positioning have been held seven times every four years since 1986. This paper presents the results of the surveys. According to the questionnaires, the following results were obtained. Averaged recognition levels of "precision" and "ultra-precision" are approximately 1 μm and 10 nm, respectively. Although the positioning accuracy is currently at the limit of development, the accuracy of less than 1 nm is expected in the future. Because the demand for higher speed and acceleration, as well as a longer stroke is increasing year by year, the linear motor drive is getting more popular. Performance of displacement sensors has been considerably improved. In particular, a linear scale unit is most often adopted for practical reasons. Because a concern has recently arisen regarding environmental issues, the replacement of hydraulic actuators with electromagnetic actuators, sparing the use of lubricating oil, is becoming more common.

本文言語English
ホスト出版物のタイトルProceedings of the 11th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2011
編集者P. Shore, Henny Spaan, H. Van Brussel, Theresa Burke
出版社euspen
ページ463-466
ページ数4
ISBN(電子版)9780955308291
出版ステータスPublished - 2011 1 1
イベント11th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2011 - Como, Italy
継続期間: 2011 5 232011 5 26

出版物シリーズ

名前Proceedings of the 11th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2011
2

Other

Other11th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2011
国/地域Italy
CityComo
Period11/5/2311/5/26

ASJC Scopus subject areas

  • 産業および生産工学
  • 機械工学
  • 材料科学(全般)
  • 器械工学
  • 環境工学

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