Questionnaire surveys on the ultra-precision positioning have been held seven times every four years since 1986. This paper presents the results of the surveys. According to the questionnaires, the following results were obtained. Averaged recognition levels of "precision" and "ultra-precision" are approximately 1 μm and 10 nm, respectively. Although the positioning accuracy is currently at the limit of development, the accuracy of less than 1 nm is expected in the future. Because the demand for higher speed and acceleration, as well as a longer stroke is increasing year by year, the linear motor drive is getting more popular. Performance of displacement sensors has been considerably improved. In particular, a linear scale unit is most often adopted for practical reasons. Because a concern has recently arisen regarding environmental issues, the replacement of hydraulic actuators with electromagnetic actuators, sparing the use of lubricating oil, is becoming more common.