Quartz-crystal cantilevered resonator for nanometric sensing

Ikusei Rin, Takahito Ono, Masayoshi Esashi

研究成果: Conference contribution

2 被引用数 (Scopus)

抄録

A thin rectangle cantilevered resonator of AT-cut quartz crystal has been developed for force and nanometric sensing. The cantilevers with thicknesses of 15-27 μm were fabricated by deep reactive ion etching (deep-RIE). Its force sensing principle using the quartz cantilever is based on the resonant frequency changes in the case that an external force is applied. Shear vibration in the direction of the electrical axis can be piezoelectrically exited and detected. Also flexural and torsional vibrations can be exited and piezoelectrically detected despite of the weak electromechanical coupling. Using flexural and torsional modes, scanning probe microscopy for topographic imaging is demonstrated.

本文言語English
ホスト出版物のタイトルTRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers
ページ247-251
ページ数5
出版ステータスPublished - 2005 11 9
イベント13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05 - Seoul, Korea, Republic of
継続期間: 2005 6 52005 6 9

出版物シリーズ

名前Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05
1

Other

Other13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05
CountryKorea, Republic of
CitySeoul
Period05/6/505/6/9

ASJC Scopus subject areas

  • Engineering(all)

フィンガープリント 「Quartz-crystal cantilevered resonator for nanometric sensing」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

引用スタイル