Quantitative measurement of submicrometre electrical conductivity

Bing Feng Ju, Yang Ju, Masumi Saka

研究成果: Article査読

7 被引用数 (Scopus)

抄録

Electrical conductivity of a 99.999% aluminium wire with a 400 nm width and a 350 nm thickness was measured using the four-point atomic force microscope (AFM) technique. This technique is a combination of the principles of the four-point probe method and standard AFM. The equipment is capable of simultaneously measuring both surface topography and local electrical conductivity. Experiments show the microprobe to be mechanically flexible and robust. The repeatability of conductivity measurements indicates that this four-point AFM probe could be used for fast in situ characterization of local electrical properties of nanocircuits and nanodevices.

本文言語English
ページ(範囲)7467-7470
ページ数4
ジャーナルJournal of Physics D: Applied Physics
40
23
DOI
出版ステータスPublished - 2007 12 7

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Acoustics and Ultrasonics
  • Surfaces, Coatings and Films

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