Quantitative control and detection of heterovalent impurities in ZnO thin films grown by pulsed laser deposition

M. Sumiya, S. Fuke, A. Tsukazaki, K. Tamura, A. Ohtomo, M. Kawasaki, H. Koinuma

研究成果: Article査読

40 被引用数 (Scopus)

抄録

The heterovalent impurities in ZnO thin films, prepared by pulsed laser deposition were analyzed using secondary ion mass spectroscopy (SIMS). It was found that alternative ablation was effective not only for achieving systematic control of Ga concentration but also for minimizing the contamination of undesired impurities. The composition spread sample included a region with the correct concentration ratio.

本文言語English
ページ(範囲)2562-2569
ページ数8
ジャーナルJournal of Applied Physics
93
5
DOI
出版ステータスPublished - 2003 3 1

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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