Total (Mtotal) and insoluble (Minsol) contents of element, and inclusion composition in metal samples have been analyzed quantitatively by using the laser ablation ICP-MS (LA-ICP-MS). The contents of Mtotal and Minsol in Fe-M, Fe-10mass%Ni-M, and Fe-0.2mass%C-M (M=Ti, Al, and Ce) alloys obtained by LA-ICP-MS are compared with those from chemical analysis. The compositions of synthetic particles (CA2, CA, C12A7, C3A, CAM, and MA; C=CaO, A=Al2O3, and M=MgO) and complex inclusions (Al2O3-TiN and Ce2O3-TiN) on a surface of glass or metal sample are analyzed by LA-ICP-MS, and these values are compared with those from EPMA and chemical analysis. It is found that LA-ICP-MS is an useful technique to the quantitative analysis of total and insoluble contents of elements and composition of inclusions in the range of particle diameter from 1 to 100 μm.
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