Quality factor trimming method using thermoelastic dissipation for multi-ring resonator

研究成果: Article査読

4 被引用数 (Scopus)

抄録

In this paper, a novel quality factor trimming method for a 2-axis mode-matched resonator using thermoelastic dissipation (TED) is reported. A disk resonator was designed so that the Q-factor is mainly limited by TED, in which the effect of energy dissipation can be tuned by mechanical trimming. The trimming location are carefully chosen to independently modify the Q-factors of each axis. In addition, the trimming structure is designed not to affect the resonant frequencies. From the numerical experiment, the Q-factor trimming as much as 108% could be achieved while the frequency change was 4.7% at the maximum.

本文言語English
論文番号113044
ジャーナルSensors and Actuators, A: Physical
332
DOI
出版ステータスPublished - 2021 12月 1

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 器械工学
  • 凝縮系物理学
  • 表面、皮膜および薄膜
  • 金属および合金
  • 電子工学および電気工学

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