Qualitative analysis of a diamondlike carbon film by angle-resolved x-ray photoelectron spectroscopy

Susumu Takabayashi, Kunihiko Motomitsu, Takayuki Takahagi, Akira Terayama, Keishi Okamoto, Tatsuyuki Nakatani

研究成果: Article査読

33 被引用数 (Scopus)

抄録

Angle-resolved x-ray photoelectron spectroscopy was used to investigate the surface of a diamondlike carbon film prepared by the ionized deposition method. We then analyzed the C 1s spectra using the Doniach-Šunjić (DŠ) [J. Phys. C 3, 285 (1970)] function convoluted with a Gaussian function. Consequently, we obtained four fitting curves for the carbon components in each spectrum, regardless of the assumption of the singularity index (α) in the DŠ function, which expresses the asymmetry of the C 1s spectrum. The curves were assigned in the order of binding energy to bulk s p3 carbon (283.7-283.8 eV), bulk s p2 carbon (284.2-284.3 eV), surface s p2 carbon (284.7-284.8 eV), and surface s p3 (285.3-285.4 eV) carbon. We further considered the influence of the assumption of α. Consequently, we suggest that the C 1s spectra can be quantitatively analyzed without considering the influences of α when the ratio of α for s p2 carbon to that for s p3 carbon [α (s p2): α (s p3)] is between 10:0 and 5:5. The distribution in the α ratio may indicate that the s p2 and the s p3 carbon atoms can interact with each other (hybridization) and differ from those highly oriented pyrolytic graphite and diamond, respectively.

本文言語English
論文番号103542
ジャーナルJournal of Applied Physics
101
10
DOI
出版ステータスPublished - 2007 6 11

ASJC Scopus subject areas

  • 物理学および天文学(全般)

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