We propose a simple and easy electrode formation technique on nanopolycrystalline diamond (NPD) synthesized by a high-temperature and high-pressure technique. The stronger light absorption nature of NPD than of standard transparent diamond enables the laser irradiation process on NPD. Pulsed laser irradiation using an ArF excimer laser under atmospheric condition drastically reduced the resistance of the NPD surface by forming graphite. Repetition of the laser irradiation reduced the resistance, showing a resistance of 300 Ω for the laser-irradiated area of 100 × 150 μm2. These results indicate the applicability of pulsed laser irradiation to an NPD apparatus having a conductive electrode, as well as electronic device processes.
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