Property evaluation of vapor-deposited TiN film by the analysis of elastic waves: (2nd report, film strength estimated by AE source inversion during compressive loading)

Singo Ogawa, Hideo Cho, Kazushi Yamanaka, Mikio Takemoto

研究成果: Article査読

2 被引用数 (Scopus)

フィンガープリント 「Property evaluation of vapor-deposited TiN film by the analysis of elastic waves: (2nd report, film strength estimated by AE source inversion during compressive loading)」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

Engineering & Materials Science