Properties and structure of carbon excess TixC1-x deposited onto molybdenum by magnetron sputtering

T. Shikama, H. Araki, M. Fujitsuka, M. Fukutomi, H. Shinno, M. Okada

研究成果: Article査読

31 被引用数 (Scopus)

抄録

There has been little concern about the properties and structure of the carbon excess TixC1-x(x<0.5) deposits, although many investigations have been conducted on the single-phase TixC1-x(x>0.5) deposits. It is found that carbon excess TixC1-x deposits prepared by magnetron sputter coating have a higher microhardness than the stoichiometric deposits and show a strongly (111)-preferred orientation. The results of C Kα X-ray spectroscopy of these films strongly suggest that carbon excess TixC1-x exists as a single phase of titanium carbide without the formation of a secondary graphite phase. The abnormal diffusion of substrate molybdenum atoms into the carbon excess TixC1-x deposits suggests that they contain a high population of the titanium vacancies.

本文言語English
ページ(範囲)185-194
ページ数10
ジャーナルThin Solid Films
106
3
DOI
出版ステータスPublished - 1983 8 19

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 表面および界面
  • 表面、皮膜および薄膜
  • 金属および合金
  • 材料化学

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