There has been little concern about the properties and structure of the carbon excess TixC1-x(x<0.5) deposits, although many investigations have been conducted on the single-phase TixC1-x(x>0.5) deposits. It is found that carbon excess TixC1-x deposits prepared by magnetron sputter coating have a higher microhardness than the stoichiometric deposits and show a strongly (111)-preferred orientation. The results of C Kα X-ray spectroscopy of these films strongly suggest that carbon excess TixC1-x exists as a single phase of titanium carbide without the formation of a secondary graphite phase. The abnormal diffusion of substrate molybdenum atoms into the carbon excess TixC1-x deposits suggests that they contain a high population of the titanium vacancies.
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