Production of uniform large-diameter radio-frequency discharge plasma

Yunlong Li, Satoru Iizuka, Noriyoshi Sato

研究成果: Article査読

28 被引用数 (Scopus)

抄録

A new radio-frequency (rf) discharge plasma source at frequency of 13.56 MHz is presented. The rf plasma is produced by a modified magnetron-typed rf discharge using a cylindrical electrode with permanent magnet rings. The electron density of 2.5×1010 cm-3 with an electron temperature of 3.7 eV, uniform within a few percent over 50 cm in diameter, is obtained on both sides at 5-6 cm from the axial center of the rf electrode when the rf power is 600 W under argon pressure of 3.6×10-4 Torr.

本文言語English
ページ(範囲)28-30
ページ数3
ジャーナルApplied Physics Letters
65
1
DOI
出版ステータスPublished - 1994 12月 1

ASJC Scopus subject areas

  • 物理学および天文学(その他)

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