TY - CHAP
T1 - Process control of carbon nanotube formation using RF glow-discharge plasma in strong magnetic field
AU - Kaneko, T.
AU - Matsuoka, H.
AU - Hirata, T.
AU - Hatakeyama, R.
AU - Tohji, K.
N1 - Funding Information:
We express our gratitude to H. Ishida and K. Motomiya for their technical support and useful discussion. This work was supported partly by the Foundation “Hattori-Hokokai”, and partly by a Grant-in-Aid for Scientific Research from the Ministry of Education, Culture, Sports, Science and Technology, Japan.
PY - 2005
Y1 - 2005
N2 - This chapter discusses the process control of carbon nanotube formation using radio frequency (rf) glow-discharge plasma in strong magnetic field. The formation of uniform and well-aligned multi-walled carbon nanotubes (MWNTs) is investigated by controlling rf glow-discharge plasmas in strong magnetic field. When the magnetic field is weak, the MWNTs growing directly on the rf electrode are deformed by the bombardment of the high energy ions generated by the large sheath electric field in front of the rf electrode. When the strong magnetic field is applied the MWNTs are observed to be well aligned and not deformed. These results can be explained by the fact that the ion bombardment energy reduces the existence of the large sheath electric field, which is caused by the magnetization of the ions in the strong magnetic field.
AB - This chapter discusses the process control of carbon nanotube formation using radio frequency (rf) glow-discharge plasma in strong magnetic field. The formation of uniform and well-aligned multi-walled carbon nanotubes (MWNTs) is investigated by controlling rf glow-discharge plasmas in strong magnetic field. When the magnetic field is weak, the MWNTs growing directly on the rf electrode are deformed by the bombardment of the high energy ions generated by the large sheath electric field in front of the rf electrode. When the strong magnetic field is applied the MWNTs are observed to be well aligned and not deformed. These results can be explained by the fact that the ion bombardment energy reduces the existence of the large sheath electric field, which is caused by the magnetization of the ions in the strong magnetic field.
UR - http://www.scopus.com/inward/record.url?scp=84884454738&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84884454738&partnerID=8YFLogxK
U2 - 10.1016/B978-008044504-5/50013-1
DO - 10.1016/B978-008044504-5/50013-1
M3 - Chapter
AN - SCOPUS:84884454738
SN - 9780080445045
SP - 67
EP - 70
BT - Novel Materials Processing by Advanced Electromagnetic Energy Sources
PB - Elsevier
ER -