TY - JOUR
T1 - Prevention of surface corrugation thermal deformation for InGaAsP/InP DFB lasers
AU - Nagai, Haruo
AU - Noguchi, Yoshio
AU - Matsuoka, Takashi
AU - Suzuki, Yoshio
PY - 1983/5
Y1 - 1983/5
N2 - Thermal deformation mechanism for surface corrugations fabricated on InP and InGaAsP crystal surfaces has been analyzed, and threshold value existence for PH3partial pressure in H2ambient to prevent the deformation is shown. It has been verified that as-fabricated corrugation height can be conserved even after the LPE process by preventing thermal deformation before growth and by retaining an adequate supersaturation for the growth melt. Applying the results of these studies, heterostructures for 1.3∼1.5 µm region DFB lasers with first order grating of near 1000 Å corrugation height have been fabricated.
AB - Thermal deformation mechanism for surface corrugations fabricated on InP and InGaAsP crystal surfaces has been analyzed, and threshold value existence for PH3partial pressure in H2ambient to prevent the deformation is shown. It has been verified that as-fabricated corrugation height can be conserved even after the LPE process by preventing thermal deformation before growth and by retaining an adequate supersaturation for the growth melt. Applying the results of these studies, heterostructures for 1.3∼1.5 µm region DFB lasers with first order grating of near 1000 Å corrugation height have been fabricated.
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U2 - 10.1143/JJAP.22.L291
DO - 10.1143/JJAP.22.L291
M3 - Article
AN - SCOPUS:0020748504
VL - 22
SP - L291-L293
JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
SN - 0021-4922
IS - 5
ER -