Preparation of ZrO₂-Y₂O₃ films by CVD using β-diketone metal chelates

Films in the system ZrO₂-Y₂O₃ were prepared at 600° to 1000°C by chemical vapor deposition using β-diketone chelates of Zr and Y and O₂. The films having Y₂O₃ contents from 2 to 12% were obtained at various evaporation temperatures of the sources. The films containing less than 3 mol% Y₂O₃ were composed of cubic and tetragonal phases. The films containing more than 3 mol% Y₂O₃ had a cubic crystal structure. The lattice parameter of the cubic phase increased from 5.11 to 5.16A with increasing Y₂O₃ content. The deposition rates of the cubic-phase films at 620° and 660°C were 1.8 and 9.0 μm/h, respectively. The film deposited at 60°C was composed of randomly oriented fine grains. Dendritic structures were observed for the films deposited above 660°C. The films exhibited a crystallographic orientation of (100) parallel to the substrate plane.