Preparation of ZrO2-Y2O3 films by CVD using β-diketone metal chelates

Masanobu Aizawa, Chihiro Kobayashi, Hisanori Yamane, Toshio Hirai

研究成果: Article査読

5 被引用数 (Scopus)


Films in the system ZrO2-Y2O3 were prepared at 600° to 1000°C by chemical vapor deposition using β-diketone chelates of Zr and Y and O2. The films having Y2O3 contents from 2 to 12% were obtained at various evaporation temperatures of the sources. The films containing less than 3 mol% Y2O3 were composed of cubic and tetragonal phases. The films containing more than 3 mol% Y2O3 had a cubic crystal structure. The lattice parameter of the cubic phase increased from 5.11 to 5.16A with increasing Y2O3 content. The deposition rates of the cubic-phase films at 620° and 660°C were 1.8 and 9.0 μm/h, respectively. The film deposited at 60°C was composed of randomly oriented fine grains. Dendritic structures were observed for the films deposited above 660°C. The films exhibited a crystallographic orientation of (100) parallel to the substrate plane.

ジャーナルNippon Seramikkusu Kyokai Gakujutsu Ronbunshi/Journal of the Ceramic Society of Japan
出版ステータスPublished - 1993

ASJC Scopus subject areas

  • Ceramics and Composites
  • Chemistry(all)
  • Condensed Matter Physics
  • Materials Chemistry

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