Preparation of Y-Ba-Cu-O Superconducting Films on Si Substrates by Chemical Vapor Deposition

Hisanori Yamane, Yoshiki Amamoto, Toshio Hirai, Hideyuki Kurosawa, Tsutomu Yamashita, Hiroaki Myoren, Yukio Osaka

    研究成果: Article査読

    抄録

    Y-Ba-Cu-O films were prepared at 700»C on Si(100) substrates and on (Y2O3)/(Y2O3 stabilized ZrO2) buffer layers by chemical vapor deposition using p-diketone metal chelates assources. The films were mainly composed of c-axis oriented YBa2Cu3Ox. Auger electron spectroscopy revealed interdiffusion of elements between the substrates and the films deposited directly on the Si substrates. The interdiffusion was prevented using the buffer layers. Epitaxial growth of YBa2Cu3Ox was confiremed by X-ray pole figure analysis for the films depositedon the Si substrates with the buffer layers. The films on the buffer layers showed zero resistivity at 87 K. Its critical current density was 10 3A/cm2 at 77 K and 0 T.

    本文言語English
    ページ(範囲)740-743
    ページ数4
    ジャーナルjournal of the japan society of powder and powder metallurgy
    39
    9
    DOI
    出版ステータスPublished - 1992 6

    ASJC Scopus subject areas

    • 機械工学
    • 産業および生産工学
    • 金属および合金
    • 材料化学

    フィンガープリント

    「Preparation of Y-Ba-Cu-O Superconducting Films on Si Substrates by Chemical Vapor Deposition」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

    引用スタイル