Titanium dioxide thin films were prepared by using four water-soluble titanium complexes of titanium-lactate, tartalate, malate and salicylate complex solutions. The crystalline phases detected in the films were anatase. The surface microstructures of the four film samples were different in their grain sizes. Photocatalytic decomposition activity of the four films was almost the same, but their photoinduced hydrophilicities were different. The film prepared using titanium-salicylate complex exhibited lower hydrophilic conversion rate than the other films. Grain size and stress yielded to the film are considered to be important factors on the photoinduced hydrophilicity. Titanium dioxide (TiO2) films prepared by using water-soluble titanium complexes had different surface microstructures with the kind of the complexes. The contact angle on the samples decreased with UV irradiation time, but the hydrophilic conversion rate seems to be different from each other. With increasing the grain size on the film surface, the rate was slow. It is considered that grain size and stress yielded to the film surface are important factors on the photoinduced hydrophilicity.
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