TY - JOUR
T1 - Preparation of Na-β-alumina films by laser chemical vapor deposition
AU - Chi, Chen
AU - Katsui, Hirokazu
AU - Goto, Takashi
N1 - Funding Information:
We thank K. Omura for her technical help in the XPS measurement. This work was supported by the Challenging Exploratory Research No. 26560235 , Ministry of Education, Culture, Sports, Science and Technology (MEXT) , a cooperative program of the ARCMG-IMR No. 14G0402 , Tohoku University, China Scholarship Council and the 111 Project ( B13035 ) of China.
Publisher Copyright:
© 2015 Elsevier B.V..
PY - 2015/8/25
Y1 - 2015/8/25
N2 - This study demonstrates the growth of Na-β-alumina films by laser chemical vapor deposition and investigates the effects of deposition temperature (Tdep), molar ratio of Na/Al (RNa/Al) and total pressure (Ptot) on the phase formation, microstructure, orientations and deposition rate (Rdep) of the film. Single-phase Na-β-alumina films were deposited at (Tdep)=1310K-1360K, RNa/Al>20 and Ptot>600Pa. Na-β-alumina films with the hexagonally faceted platelet morphology were deposited at Ptot=1000Pa, whereas flake-like grains were formed at Ptot=600Pa. Na-β-alumina was co-deposited with α-Al2O3 at Ptot<600Pa and Tdep>1350K, in which the film morphology showed flake-like grains with smaller granules. The maximum Rdep of Na-β-alumina films was 44μmh-1.
AB - This study demonstrates the growth of Na-β-alumina films by laser chemical vapor deposition and investigates the effects of deposition temperature (Tdep), molar ratio of Na/Al (RNa/Al) and total pressure (Ptot) on the phase formation, microstructure, orientations and deposition rate (Rdep) of the film. Single-phase Na-β-alumina films were deposited at (Tdep)=1310K-1360K, RNa/Al>20 and Ptot>600Pa. Na-β-alumina films with the hexagonally faceted platelet morphology were deposited at Ptot=1000Pa, whereas flake-like grains were formed at Ptot=600Pa. Na-β-alumina was co-deposited with α-Al2O3 at Ptot<600Pa and Tdep>1350K, in which the film morphology showed flake-like grains with smaller granules. The maximum Rdep of Na-β-alumina films was 44μmh-1.
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U2 - 10.1016/j.surfcoat.2015.06.019
DO - 10.1016/j.surfcoat.2015.06.019
M3 - Article
AN - SCOPUS:84939265494
VL - 276
SP - 534
EP - 538
JO - Surface and Coatings Technology
JF - Surface and Coatings Technology
SN - 0257-8972
ER -