Preparation of lead zirconate titanate thin films with a combination of self-assembly and spin-coating techniques

Tomokazu Tanase, Yoshio Kobayashi, Mikio Konno

研究成果: Article査読

4 被引用数 (Scopus)

抄録

A low-temperature synthetic method for preparing lead zirconate titanate (PZT) perovskite film on a Pt substrate is proposed. The method consists of the self-assembly of PZT particles on a substrate and successive spin coating with a precursor of PZT. The PZT particles that had sub-micron sizes and perovskite structures were prepared by annealing amorphous PZT particles formed from a complex alkoxide precursor. The PZT particles were deposited on a Pt substrate that was surface-modified with (3-mercaptopropyl) trimethoxysilane to chemically fix the particles on the substrate. Another PZT precursor solution was used for the spin-coating on the PZT-deposited substrate, and then the spin-coated film was annealed at 350°C to remove organic residues left in the film. The spin-coated PZT film prepared at 350°C had a dielectric constant of 118 at a frequency of 1000 Hz.

本文言語English
ページ(範囲)264-269
ページ数6
ジャーナルThin Solid Films
457
2
DOI
出版ステータスPublished - 2004 6月 15

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 表面および界面
  • 表面、皮膜および薄膜
  • 金属および合金
  • 材料化学

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