Preparation of clean and well-ordered hydrogen-terminated Si(1 1 0)-(1 × 1) surfaces and the measurements of vibrational modes

S. Suto, K. Matsui, S. Y. Matsushita, H. Kato, H. Nakaya, T. Taoka, A. Kasuya, T. Yamada

研究成果: Article査読

6 被引用数 (Scopus)

抄録

We propose electrochemical and wet chemical processes to prepare the clean and well-ordered hydrogen-terminated Si(1 1 0)-(1 × 1) surfaces, with our evaluation by low-energy electron-diffraction (LEED), high-resolution electron-energy-loss spectroscopy (HREELS) and X-ray photoelectron spectroscopy (XPS). Clear (1 × 1) LEED patterns indicated the two-dimensional space group of p2mg. The intrinsic SiH bending and stretching modes and surface phonon modes, as well as hydrocarbon impurities were observed by HREELS. Among the procedures tested, the electrochemical etching in a NH 4 F solution yielded the best ordered surface. The wet chemical etching produced the clean samples suitable for HREELS measurements.

本文言語English
ページ(範囲)90-92
ページ数3
ジャーナルApplied Surface Science
267
DOI
出版ステータスPublished - 2013 2 15

ASJC Scopus subject areas

  • 化学 (全般)
  • 凝縮系物理学
  • 物理学および天文学(全般)
  • 表面および界面
  • 表面、皮膜および薄膜

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