Preparation of Cd1-xYxSb2O6 thin film on glass substrate by radio frequency sputtering

Kazuhiko Yanagawa; Yoshimichi Ohki; Takahisa Omata; Hideo Hosono; Naoyuki Ueda; Hiroshi Kawazoe

doi:10.1063/1.112316

Preparation of Cd_1-xY_xSb₂O₆ thin film on glass substrate by radio frequency sputtering

Kazuhiko Yanagawa, Yoshimichi Ohki, Takahisa Omata, Hideo Hosono, Naoyuki Ueda, Hiroshi Kawazoe

研究成果: Article › 査読

40 被引用数 (Scopus)

抄録

Cd_1-xY_xSb₂O₆ thin films were deposited onto a silica glass substrate by rf sputtering method. The highest conductivity observed for Cd_0.95Y_0.05Sb₂O ₆ thin films was 4.1×10 S cm^-1, with a carrier concentration of 1.3×10²⁰ cm^-3 and a Hall mobility of 1.9 cm² V^-1S ^-1. No distinct optical absorption band was observed from the visible to the infrared region. These observations show that Cd_1-xY_xSb₂O₆ thin films have characteristics of a transparent conductor, whose transparent wavelength region covers the near infrared.

本文言語	English
ページ（範囲）	406-408
ページ数	3
ジャーナル	Applied Physics Letters
巻	65
号	4
DOI	https://doi.org/10.1063/1.112316
出版ステータス	Published - 1994
外部発表	はい

ASJC Scopus subject areas

物理学および天文学（その他）

文献へのアクセス

10.1063/1.112316

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引用スタイル

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AU - Ueda, Naoyuki

AU - Kawazoe, Hiroshi

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AB - Cd1-xYxSb2O6 thin films were deposited onto a silica glass substrate by rf sputtering method. The highest conductivity observed for Cd0.95Y0.05Sb2O 6 thin films was 4.1×10 S cm-1, with a carrier concentration of 1.3×1020 cm-3 and a Hall mobility of 1.9 cm2 V-1S -1. No distinct optical absorption band was observed from the visible to the infrared region. These observations show that Cd1-xYxSb2O6 thin films have characteristics of a transparent conductor, whose transparent wavelength region covers the near infrared.

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