TY - JOUR
T1 - Preparation of Ba-Ti-O films by laser chemical vapor deposition
AU - Ito, Akihiko
AU - Guo, Dongyun
AU - Tu, Rong
AU - Goto, Takashi
N1 - Funding Information:
This work was supported in part by Global COE Program of the Materials Integration, Tohoku University , by ICC-IMR Program of Tohoku University , and by the International Science and Technology Cooperation Program of China , No. 2009DFB50470 . This work was also supported in part by JSPS , Grant-in-Aid for Young Scientists (B), No. 22760550 , and by MEXT , Grant-in-Aid for Scientific Research (A), No. 22246082 .
PY - 2012/3/15
Y1 - 2012/3/15
N2 - Ba-Ti-O films were prepared on Pt-coated Si substrate by laser chemical vapor deposition, and their orientations and microstructures were compared. Ba 2TiO 4, BaTiO 3, BaTi 2O 5, Ba 4Ti 13O 30 and BaTi 4O 9 single-phase films were prepared at Ti to Ba molar ratio from 0.41 to 3.49. The α′-Ba 2TiO 4 film showed (0 1 0) and (0 9 1) co-orientation with elongated, truncated columnar grains. The BaTiO 3 film was composed of triangular and hexagonal grains with slight (1 1 1) orientation. The BaTi 2O 5 film had (0 1 0) orientation and faceted columnar grains. The Ba 4Ti 13O 40 film showed (1 0 0) and (0 1 2) co-orientation with shellfish-like grains. The BaTi 4O 9 film showed (0 1 0) orientation with slightly rounded faceted columnar grains. The deposition rates of Ba-Ti-O films ranged from 30 to 144 μm h -1.
AB - Ba-Ti-O films were prepared on Pt-coated Si substrate by laser chemical vapor deposition, and their orientations and microstructures were compared. Ba 2TiO 4, BaTiO 3, BaTi 2O 5, Ba 4Ti 13O 30 and BaTi 4O 9 single-phase films were prepared at Ti to Ba molar ratio from 0.41 to 3.49. The α′-Ba 2TiO 4 film showed (0 1 0) and (0 9 1) co-orientation with elongated, truncated columnar grains. The BaTiO 3 film was composed of triangular and hexagonal grains with slight (1 1 1) orientation. The BaTi 2O 5 film had (0 1 0) orientation and faceted columnar grains. The Ba 4Ti 13O 40 film showed (1 0 0) and (0 1 2) co-orientation with shellfish-like grains. The BaTi 4O 9 film showed (0 1 0) orientation with slightly rounded faceted columnar grains. The deposition rates of Ba-Ti-O films ranged from 30 to 144 μm h -1.
KW - A. Ceramics
KW - A. Inorganic compound
KW - B. Chemical vapor deposition
KW - D. Microstructure
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U2 - 10.1016/j.matchemphys.2012.01.048
DO - 10.1016/j.matchemphys.2012.01.048
M3 - Article
AN - SCOPUS:84857789104
SN - 0254-0584
VL - 133
SP - 398
EP - 404
JO - Materials Chemistry and Physics
JF - Materials Chemistry and Physics
IS - 1
ER -