Preparation of Ag-alloy top-electrode for ferroelectric Pb(Zr, Ti)O 3 films under various atmospheres

Hiroshi Masumoto, Atsushi Kojima, Takashi Iijima, Takashi Goto

研究成果: Article査読

7 被引用数 (Scopus)

抄録

An Ag-alloy (97Ag-lPd-2Cu in mol%) was proposed as a new top-electrode for Pb(Zr,Ti)O3 (PZT) films. The effect of annealing temperatur̀e on the ferroelectric performance of PZT films using the Ag-alloy and Pt top-electrodes was investigated in a H2-containing atmosphere. In the case of the Pt top-electrode, the ferroelectricity of PZT films disappeared after annealing over 300°C. Exfoliations of the Pt bottom-electrode from the substrate were observed after annealing over 300°C. In the case of the Ag-alloy top-electrode, no chemical reaction between the Ag-alloy electrode and PZT film was observed after annealing at 400°C. The ferroelectricity of PZT film was maintained even after annealing at 350°C using the Ag-alloy electrode

本文言語English
ページ(範囲)6882-6885
ページ数4
ジャーナルJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
41
11 B
DOI
出版ステータスPublished - 2002 11 1

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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