Preparation of a long superconducting NbN wire by rf sputtering method

H. Morita, K. Watanabe, K. Noto, H. Fujimori

研究成果: Conference contribution

1 被引用数 (Scopus)

抄録

Thin films were prepared by a rf reactive sputtering method as a preliminary experiment for preparing long Bl-NbN wire. Optimum sputtering conditions were experimentally assessed by measuring the dependence of critical temperature and critical current density on process parameters such as nitrogen and argon partial pressure, rf discharge power, substrate temperature, and sample thickness.

本文言語English
ホスト出版物のタイトルAdvances in Cryogenic Engineering
出版社Publ by Plenum Publ Corp
ページ829-834
ページ数6
ISBN(印刷版)0306428016
出版ステータスPublished - 1988 12 1
イベントProceedings of the Seventh International Cryogenic Materials Conference - ICMC - St. Charles, IL, USA
継続期間: 1987 6 141987 6 18

出版物シリーズ

名前Advances in Cryogenic Engineering
34
ISSN(印刷版)0065-2482

Other

OtherProceedings of the Seventh International Cryogenic Materials Conference - ICMC
CitySt. Charles, IL, USA
Period87/6/1487/6/18

ASJC Scopus subject areas

  • 工学(全般)

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