Preparation of (001)c-oriented epitaxial (K, Na)NbO3 thick films by repeated hydrothermal deposition technique

Takahisa Shiraishi, Yoshiharu Ito, Mutsuo Ishikawa, Hiroshi Uchida, Takanori Kiguchi, Minoru K. Kurosawa, Hiroshi Funakubo, Toyohiko J. Konno

研究成果: Article査読

9 被引用数 (Scopus)


(001)c-oriented (K0.86Na0.14)NbO3 thick films were prepared at 240°C on (100)cSrRuO3//(100)SrTiO3 substrates by repeated hydrothermal deposition technique. The film thickness was found to increase linearly with the number of deposition cycles, and 60 ¯m-thick film was obtained after nine repetitions of the deposition. The K/(K+Na) ratio of the deposited thick films, measured by X-ray fluorescence spectroscopy, showed constant values regardless of the number of deposition cycles. Cross-sectional scanning electron microscopy images revealed uniformity of the obtained dense films with no obvious micro cracks and pores. Structural characterization based on X-ray diffraction, XRD 2ª-½ patterns and X-ray pole figure measurement, showed that the epitaxial relationship between the films and substrates with a (001)c orientation was maintained throughout the deposition cycles. In addition, cross-sectional Raman spectra showed that 60 ¯m-thick (K0.86Na0.14)NbO3 film had an orthorhombic structure. The dielectric constant, ¾r, and tan ¤ showed frequency dependence.

ジャーナルJournal of the Ceramic Society of Japan
出版ステータスPublished - 2018 5月

ASJC Scopus subject areas

  • セラミックおよび複合材料
  • 化学 (全般)
  • 凝縮系物理学
  • 材料化学


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