Pb(ZrxTi1-x)O3 thin films were prepared by pulsed laser deposition using the target of Pb(Zr0.45Ti0.55)O3 with excess PbO (20 wt.%) on Pt/Ti/SiO2/Si(100) substrates with and without a template layer derived by the sol-gel process. Crystalline phases and microstructure of the PZT films were investigated using X-ray diffraction analysis and scanning electron microscopy, respectively. The electrical properties of the PZT films were evaluated by measuring the polarization versus electric field hysteresis loop and the dielectric constant. In comparison with the experimental results, it was found that the template layer derived by the sol-gel process could effect the crystallographic orientation, and improve the electrical properties of the PZT films. It is clear that 1-3 μm thick films with good electrical properties can be fabricated by the pulsed laser deposition process on the template layer in a shorter time.
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