Preparation and characterization of PZT thin films deposited by pulsed laser deposition on template layer

Z. J. Wang, H. Y. Bi, H. Kokawa, L. Zhang, J. Tsaur, M. Ichiki, R. Maeda

研究成果: Article査読

7 被引用数 (Scopus)

抄録

Pb(ZrxTi1-x)O3 thin films were prepared by pulsed laser deposition using the target of Pb(Zr0.45Ti0.55)O3 with excess PbO (20 wt.%) on Pt/Ti/SiO2/Si(100) substrates with and without a template layer derived by the sol-gel process. Crystalline phases and microstructure of the PZT films were investigated using X-ray diffraction analysis and scanning electron microscopy, respectively. The electrical properties of the PZT films were evaluated by measuring the polarization versus electric field hysteresis loop and the dielectric constant. In comparison with the experimental results, it was found that the template layer derived by the sol-gel process could effect the crystallographic orientation, and improve the electrical properties of the PZT films. It is clear that 1-3 μm thick films with good electrical properties can be fabricated by the pulsed laser deposition process on the template layer in a shorter time.

本文言語English
ページ(範囲)1629-1632
ページ数4
ジャーナルJournal of the European Ceramic Society
24
6
DOI
出版ステータスPublished - 2004 6月

ASJC Scopus subject areas

  • セラミックおよび複合材料
  • 材料化学

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