@article{510da1b59c5b4037b253401088a4d1a4,
title = "Preface",
author = "Katsuyoshi Washio and Toshimichi Ito and Roger Loo and Seiichi Miyazaki and Shinichi Takagi",
note = "Funding Information: The conference was cosponsored by the 154 th Committee on Semiconductor Interfaces and Their Application, JSPS, the 131 st Committee on Thin Films, JSPS, and Graduate School of Engineering, Nagoya University, and supported by Applied Materials, Inc. ",
year = "2017",
month = nov,
day = "1",
doi = "10.1016/j.mssp.2017.07.024",
language = "English",
volume = "70",
pages = "1--2",
journal = "Materials Science in Semiconductor Processing",
issn = "1369-8001",
publisher = "Elsevier Limited",
}