Polyimide optical waveguide with multi-fan-out for multichip module application

Takuji Matsumoto, Takeshi Fukuoka, Hiroyuki Kurino, Mitsumasa Koyanagi

研究成果: Conference contribution

抄録

We developed a polyimide optical waveguide with multi-fan-out which can be used as an optical interconnection between the many LSI chips in a multichip module system. The propagation direction of the signal light is changed from horizontal to vertical and from vertical to horizontal using aluminum micromirrors in this waveguide. A significant increase of photodiode current was observed when a signal light impinged on the photodiode after it was introduced into this wav:eguide and then the propagation direction was bent by aluminum micromirror.

本文言語English
ホスト出版物のタイトルEuropean Solid-State Device Research Conference
編集者H. Grunbacher
出版社IEEE Computer Society
ページ276-279
ページ数4
ISBN(電子版)2863322214
DOI
出版ステータスPublished - 1997 1月 1
イベント27th European Solid-State Device Research Conference, ESSDERC 1997 - Stuttgart, Germany
継続期間: 1997 9月 221997 9月 24

出版物シリーズ

名前European Solid-State Device Research Conference
ISSN(印刷版)1930-8876

Other

Other27th European Solid-State Device Research Conference, ESSDERC 1997
国/地域Germany
CityStuttgart
Period97/9/2297/9/24

ASJC Scopus subject areas

  • 電子工学および電気工学
  • 安全性、リスク、信頼性、品質管理

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