@inproceedings{bb5e63e49f09456fa5a17737160578d5,
title = "Polyimide optical waveguide with multi-fan-out for multichip module application",
abstract = "We developed a polyimide optical waveguide with multi-fan-out which can be used as an optical interconnection between the many LSI chips in a multichip module system. The propagation direction of the signal light is changed from horizontal to vertical and from vertical to horizontal using aluminum micromirrors in this waveguide. A significant increase of photodiode current was observed when a signal light impinged on the photodiode after it was introduced into this wav:eguide and then the propagation direction was bent by aluminum micromirror.",
author = "Takuji Matsumoto and Takeshi Fukuoka and Hiroyuki Kurino and Mitsumasa Koyanagi",
year = "1997",
month = jan,
day = "1",
doi = "10.1109/ESSDERC.1997.194419",
language = "English",
series = "European Solid-State Device Research Conference",
publisher = "IEEE Computer Society",
pages = "276--279",
editor = "H. Grunbacher",
booktitle = "European Solid-State Device Research Conference",
note = "27th European Solid-State Device Research Conference, ESSDERC 1997 ; Conference date: 22-09-1997 Through 24-09-1997",
}