Polyimide optical waveguide with multi-fan-out for multi-chip module application

Takuji Matsumoto, Yutaka Noguchi, Yoshiharu Kudoh, Mitsumasa Koyanagi

研究成果: Article査読

8 被引用数 (Scopus)

抄録

We developed a polyimide optical waveguide with multi-fan-out which can be used as an optical interconnection between the many LSI chips in a multichip module system. The propagation direction of the signal light is changed from horizontal to vertical and from vertical to horizontal using aluminum micromirrors in this waveguide. We then introduced a signal light into this waveguide, the propagation direction of which was bent by an aluminum micromirror. It impinged on the photodiode to induce a significant increase in the photodiode current.

本文言語English
ページ(範囲)1903-1906
ページ数4
ジャーナルJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
36
3 SUPPL. B
DOI
出版ステータスPublished - 1997 3

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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