Polarization performance of EUV transmission multilayers as λ/4 and λ/2 plates at a photon energy of 97 eV

Masaki Yamamoto, Hiroshi Nomura, Mihiro Yanagihara, Minaji Furudate, Makoto Watanabe

研究成果: Article査読

9 被引用数 (Scopus)

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Engineering & Materials Science

Chemical Compounds

Physics & Astronomy