Polarization performance of EUV transmission multilayers as λ/4 and λ/2 plates at a photon energy of 97 eV

Masaki Yamamoto; Hiroshi Nomura; Mihiro Yanagihara; Minaji Furudate; Makoto Watanabe

doi:10.1016/s0368-2048(98)00403-4

Polarization performance of EUV transmission multilayers as λ/4 and λ/2 plates at a photon energy of 97 eV

Masaki Yamamoto, Hiroshi Nomura, Mihiro Yanagihara, Minaji Furudate, Makoto Watanabe

多元物質科学研究所

研究成果: Article › 査読

9 被引用数 (Scopus)

抄録

Complex relative amplitude transmittance p = T_p/T_s of extreme ultraviolet transmission multilayers fabricated to three numbers of layers has been evaluated by ellipsometry with synchrotron radiation at a photon energy of 97 eV. Large phase shifts enough to be a quarter-wave plate and a half-wave plate have been observed with respective transmittances of 10 and 0.5%.

本文言語	English
ページ（範囲）	869-873
ページ数	5
ジャーナル	Journal of Electron Spectroscopy and Related Phenomena
巻	101-103
DOI	https://doi.org/10.1016/s0368-2048(98)00403-4
出版ステータス	Published - 1999

ASJC Scopus subject areas

電子材料、光学材料、および磁性材料
放射線
原子分子物理学および光学
凝縮系物理学
分光学
物理化学および理論化学

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10.1016/s0368-2048(98)00403-4

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title = "Polarization performance of EUV transmission multilayers as λ/4 and λ/2 plates at a photon energy of 97 eV",

abstract = "Complex relative amplitude transmittance p = Tp/Ts of extreme ultraviolet transmission multilayers fabricated to three numbers of layers has been evaluated by ellipsometry with synchrotron radiation at a photon energy of 97 eV. Large phase shifts enough to be a quarter-wave plate and a half-wave plate have been observed with respective transmittances of 10 and 0.5%.",

keywords = "EUV transmission multilayers, Ellipsometry, Polarization, Synchrotron",

author = "Masaki Yamamoto and Hiroshi Nomura and Mihiro Yanagihara and Minaji Furudate and Makoto Watanabe",

year = "1999",

doi = "10.1016/s0368-2048(98)00403-4",

language = "English",

volume = "101-103",

pages = "869--873",

journal = "Journal of Electron Spectroscopy and Related Phenomena",

issn = "0368-2048",

publisher = "Elsevier",

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TY - JOUR

T1 - Polarization performance of EUV transmission multilayers as λ/4 and λ/2 plates at a photon energy of 97 eV

AU - Yamamoto, Masaki

AU - Nomura, Hiroshi

AU - Yanagihara, Mihiro

AU - Furudate, Minaji

AU - Watanabe, Makoto

PY - 1999

Y1 - 1999

N2 - Complex relative amplitude transmittance p = Tp/Ts of extreme ultraviolet transmission multilayers fabricated to three numbers of layers has been evaluated by ellipsometry with synchrotron radiation at a photon energy of 97 eV. Large phase shifts enough to be a quarter-wave plate and a half-wave plate have been observed with respective transmittances of 10 and 0.5%.

AB - Complex relative amplitude transmittance p = Tp/Ts of extreme ultraviolet transmission multilayers fabricated to three numbers of layers has been evaluated by ellipsometry with synchrotron radiation at a photon energy of 97 eV. Large phase shifts enough to be a quarter-wave plate and a half-wave plate have been observed with respective transmittances of 10 and 0.5%.

KW - EUV transmission multilayers

KW - Ellipsometry

KW - Polarization

KW - Synchrotron

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UR - http://www.scopus.com/inward/citedby.url?scp=0003623916&partnerID=8YFLogxK

U2 - 10.1016/s0368-2048(98)00403-4

DO - 10.1016/s0368-2048(98)00403-4

M3 - Article

AN - SCOPUS:0003623916

VL - 101-103

SP - 869

EP - 873

JO - Journal of Electron Spectroscopy and Related Phenomena

JF - Journal of Electron Spectroscopy and Related Phenomena

SN - 0368-2048

ER -

Polarization performance of EUV transmission multilayers as λ/4 and λ/2 plates at a photon energy of 97 eV

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ASJC Scopus subject areas

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