Plasmonic terahertz emitters with high-aspect ratio metal gratings

D. V. Lavrukhin, A. E. Yachmenev, I. A. Glinskiy, R. A. Khabibullin, M. Ryzhii, T. Otsuji, M. Shur, K. I. Zaytsev, D. S. Ponomarev

研究成果: Conference contribution

3 被引用数 (Scopus)


We propose a novel technology for fabricating plasmonic photoconductive antennas (PCAs) based on superlattice (SL) with increased height of the plasmonic gratings up to 100 nm. We passivate the surface of the SL by Si3N4, etch there windows and deposit Ti/Au antenna metallization. The plasmonic gratings are formed by electron-beam lithography with Ti/Au metallization followed by lift-off. Then an Al2O3 anti-reflection coating layer for reduction of the Fresnel reflection losses is used on the top of the plasmonic gratings, which also serves for maintaining its mechanical stability and providing the excitation of guided modes at the resonant wavelengths of the subwavelength slab waveguide formed by the metal gratings. Current-voltage measurements under femtosecond laser illumination reveal strong increase of the transient photocurrent generated by the fabricated plasmonic PCA which is 15 times higher than for conventional one (i.e. without the plasmonic gratings). The obtained terahertz (THz) power spectra demonstrate 100-times increase of the THz power in the plasmonic PCA. The results might be of interest to the needs of THz spectroscopy and imaging systems, in particular, operating with low-power lasers.

ホスト出版物のタイトルInternational Conference on Micro- and Nano-Electronics 2018
編集者Vladimir F. Lukichev, Konstantin V. Rudenko
出版ステータスPublished - 2019
イベントInternational Conference on Micro- and Nano-Electronics 2018, ICMNE 2018 - Zvenigorod, Russian Federation
継続期間: 2018 10月 12018 10月 5


名前Proceedings of SPIE - The International Society for Optical Engineering


ConferenceInternational Conference on Micro- and Nano-Electronics 2018, ICMNE 2018
国/地域Russian Federation

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 凝縮系物理学
  • コンピュータ サイエンスの応用
  • 応用数学
  • 電子工学および電気工学


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