Planer fabrication of multilayer piezoelectric actuator by groove cutting and electroplating

Gaku Suzuki, Masayoshi Esashi

研究成果: Paper査読

12 被引用数 (Scopus)

抄録

This paper reports a new planer fabrication method of multilayer piezoelectric actuator. In this method, three techniques, dicing, electroplating and laser assisted etching (LAE), were used for constructing the multilayer structure. Prototype actuators with 23-120 active layers were fabricated in this method. The measured displacement was 2.5 μm (23 layers) and 7.3 μm (120 layers) at 100 V, respectively. These values agree with the calculated values from the piezoelectric properties of the material.

本文言語English
ページ46-51
ページ数6
出版ステータスPublished - 2000 1 1
イベント13th Annual International Conference on Micro Electro Mechanical Systems (MEMS 2000) - Miyazaki, Jpn
継続期間: 2000 1 232000 1 27

Other

Other13th Annual International Conference on Micro Electro Mechanical Systems (MEMS 2000)
CityMiyazaki, Jpn
Period00/1/2300/1/27

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering
  • Mechanical Engineering

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