Pinpoint pick-up and bubble-free assembly of 2D materials using PDMS/PMMA polymers with lens shapes

Satoshi Toyoda, Teerayut Uwanno, Takashi Taniguchi, Kenji Watanabe, Kosuke Nagashio

研究成果: Article査読

20 被引用数 (Scopus)

抄録

The key to achieving high-quality van der Waals heterostructure devices made by stacking 2D layered materials lies in having a clean interface without interfacial bubbles and wrinkles. In this study, the pinpoint pick-up and transfer system of 2D crystals is constructed using polymers with lens shapes. We report the bubble-free and clean interface assembly of 2D crystals in which unidirectional sweep of the transfer interface precisely controlled with the help of the inclined substrate pushes the bubbles away from the interface.

本文言語English
論文番号055008
ジャーナルApplied Physics Express
12
5
DOI
出版ステータスPublished - 2019 5月 1
外部発表はい

ASJC Scopus subject areas

  • 工学(全般)
  • 物理学および天文学(全般)

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