Piezolectric 2D micro scanner for minimally invasive therapy fabricated using femtosecond laser ablation

N. Kikuchi, Y. Haga, M. Maeda, W. Makishi, Masayoshi Esashi

研究成果: Conference contribution

11 被引用数 (Scopus)

抄録

Piezoelectric two dimensional (2D) micro scanner was developed for medical laser scanning micro tool that is inserted in the human body and observes tissue microstructures optically and scans laser for treatment. The structure of developed micro scanner consists of three piezoelectric unimorph cantilevers, a mirror, three flexible joints and a pivot. The joints link the end of the unimorph cantilevers with the mirror. The size of the micro scanner part is 1.6 mmx5.0 mm, and the thickness is 100 μm. The mirror tilted in two dimensions and maximum tilting angle was 2.23 degree when 60 V was applied. The 2D scanner and optical system will be packaged in a tube of 2 mm diameter which can be inserted in a working channel of a conventional endscope.

本文言語English
ホスト出版物のタイトルTRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
出版社Institute of Electrical and Electronics Engineers Inc.
ページ603-606
ページ数4
ISBN(電子版)0780377311, 9780780377318
DOI
出版ステータスPublished - 2003
イベント12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers - Boston, United States
継続期間: 2003 6月 82003 6月 12

出版物シリーズ

名前TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
1

Other

Other12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers
国/地域United States
CityBoston
Period03/6/803/6/12

ASJC Scopus subject areas

  • 電子工学および電気工学

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