Piezoelectric characteristics of zno films deposited using an electron cyclotron resonance sputtering system

Michio Kadota, Toru Kasanami, Makoto Minakata

研究成果: Article査読

27 被引用数 (Scopus)

抄録

Piezoelectric properties of ZnO films were investigated for the first time by means of an electron cyclotron resonance (ECR) sputtering system. It is confirmed that this system is capable of depositing a ZnO film with a large specific resistance, a good piezoelectric property and good c-axis orientation on an interdigital transducer (IDT)/glass substrate at a low temperature (less than 200°C) and under low gas pressure ( 10-4 Torr). These ZnO films exhibited excellent surface acoustic wave (SAW) characteristics (insertion losses) and effective electromechanical coupling factors (£eff) compared with ZnO films deposited by a conventional RF magnetron sputtering system. Furthermore this ECR sputtering system was capable of depositing a ZnO film capable of driving a Rayleigh SAW of 700 MHz, without heating the substrate (room temperature), while it was impossible to drive such a wave conventionally, using other sputtering systems.

本文言語English
ページ(範囲)3013-3016
ページ数4
ジャーナルJapanese journal of applied physics
31
9S
DOI
出版ステータスPublished - 1992 9月
外部発表はい

ASJC Scopus subject areas

  • 工学(全般)
  • 物理学および天文学(全般)

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