Photothermal vibration for a cantilever placed near a planar wall in low-vacuum region

S. Inaba, K. Akaishi, T. Mori, K. Hane

研究成果: Article査読

抄録

The pressure dependence of the resonant frequency of a cantilever type solid membrane which was vibrated photothermally in air in low-vacuum was investigated, and a linear response was observed. When a planar wall was placed near the membrane, the effect of the wall on the frequency response was also investigated. The resonant frequency decreased corresponding to the narrowing of the space between the wall and the membrane. These experimental results are discussed theoretically with a vibration model for the membrane.

本文言語English
ページ(範囲)599-601
ページ数3
ジャーナルVacuum
44
5-7
DOI
出版ステータスPublished - 1993
外部発表はい

ASJC Scopus subject areas

  • 器械工学
  • 凝縮系物理学
  • 表面、皮膜および薄膜

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