抄録
KrF excimer laser induced Cr film deposition from Cr(CO)6 has been studied. Remarkable film quality dependence on laser intensity suggested the photothermal effect contribution of intensive uv laser pulses in the CVD process. A cw Ar-ion laser light and its second harmonic light were used, to separate photochemical and photothermal effects. As a result, photoinduced surface heating has been found to be very important for obtaining good quality metallic films in KrF laser induced Cr film CVD.
| 本文言語 | English |
|---|---|
| ページ（範囲） | 25-30 |
| ページ数 | 6 |
| ジャーナル | Applied Physics A Solids and Surfaces |
| 巻 | 37 |
| 号 | 1 |
| DOI | |
| 出版ステータス | Published - 1985 5月 |
| 外部発表 | はい |
ASJC Scopus subject areas
- 材料科学（全般）
- 工学（全般）
- 物理学および天文学（その他）