抄録
Films of a commercially available polyarylate (U polymer®) containing a photosensitive agent were prepared by means of spin-coating onto copper foil, which showed positive-tone behavior after UV irradiation and development with an ethanolamine/N-methyl-pyrrolidone/H2O mixture. Scanning electron microscope photographs of the images exhibited fine patterns (≈10 μm line/space resolution) with 9-14 μm film thickness. The pattern-forming mechanism is based on the reaction development patterning (RDP) process, where the main pattern-forming reaction occurs during development.
| 本文言語 | English |
|---|---|
| ページ（範囲） | 104-108 |
| ページ数 | 5 |
| ジャーナル | Macromolecular Rapid Communications |
| 巻 | 23 |
| 号 | 2 |
| DOI | |
| 出版ステータス | Published - 2002 1月 31 |
| 外部発表 | はい |
ASJC Scopus subject areas
- 有機化学
- ポリマーおよびプラスチック
- 材料化学