Photonic crystals for the visible range fabricated by autocloning technique and their application

T. Sato, K. Miura, N. Ishino, Y. Ohtera, T. Tamamura, S. Kawakami

研究成果: Article査読

74 被引用数 (Scopus)

抄録

We fabricate photonic crystals for the visible range by the 'autocloning' technique, in which multilayers are stacked by an appropriate combination of sputter deposition and sputter etching. TiO2/SiO2 and Ta2O5/SiO2 are chosen as materials since they are transparent in the range and give a high contrast of refractive indices. The fabrication technique has flexibility regarding materials and size and is very reliable and reproducible even if the pitch is less than 0.2 μm. We also study the application of photonic crystals to birefringent elements such as waveplates and polarization selective gratings and experimentally verify that they are useful for optical pick-up systems.

本文言語English
ページ(範囲)63-70
ページ数8
ジャーナルOptical and Quantum Electronics
34
1-3
DOI
出版ステータスPublished - 2002 1

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 原子分子物理学および光学
  • 電子工学および電気工学

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