Photonic crystal switch by inserting nano-crystal defects using MEMS actuator

研究成果: Conference contribution

14 被引用数 (Scopus)

抄録

A novel photonic crystal switch by inserting crystal defects using a MEMS actuator was proposed. Optical parameters for obtaining photonic crystal switch were determined. The number of air holes necessary for light switching, and allowable gaps between the air hole and silicon rod, were decided by a FDTD simulation. The fabrication techniques using electron beam lithography, fast atom beam etching and HF gas-phase etching were proposed.

本文言語English
ホスト出版物のタイトル2003 IEEE/LEOS International Conference on Optical MEMS
出版社Institute of Electrical and Electronics Engineers Inc.
ページ107-108
ページ数2
ISBN(電子版)078037830X, 9780780378308
DOI
出版ステータスPublished - 2003
イベント2003 IEEE/LEOS International Conference on Optical MEMS - Waikoloa, United States
継続期間: 2003 8 182003 8 21

出版物シリーズ

名前2003 IEEE/LEOS International Conference on Optical MEMS

Other

Other2003 IEEE/LEOS International Conference on Optical MEMS
国/地域United States
CityWaikoloa
Period03/8/1803/8/21

ASJC Scopus subject areas

  • 工学(全般)

フィンガープリント

「Photonic crystal switch by inserting nano-crystal defects using MEMS actuator」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

引用スタイル